Download A guide to hands-on MEMS design and prototyping by Joel A. Kubby PDF

By Joel A. Kubby

Even if you're a scholar taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this functional consultant presents the hands-on adventure had to layout, fabricate and try MEMS units. you'll the way to use foundry multi-project fabrication approaches for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, to boot and routines and layout demanding situations on the finish of each bankruptcy. recommendations to the layout problem difficulties are supplied online
''Whether you're a scholar taking an introductory MEMS path or a working towards engineer who must wake up to hurry speedy on MEMS layout, this functional consultant presents the hands-on adventure had to layout, fabricate and try MEMS units. you are going to the best way to use foundry multi-project fabrication methods for reasonably cheap MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition and workouts and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with options to the layout problem difficulties and a range of case experiences of MEMS devices''--  Read more... computer generated contents observe: 1. advent; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and attempt; eight. From prototype to product: MEMS deformable mirrors for adaptive optics

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7 Bending of a fixed-free cantilever beam subjected to a point load F at the free end. 8 Fixed-guided cantilever beam subjected to a point load F at the guided end. 9 Fixed-fixed beam subjected to a point load F at the middle of the beam. the beam is still able to be displaced, but the slope on the free end is fixed by its attachment to something that is stiffer than the beam. This sort of boundary condition is called a fixed-guided boundary condition. 10 Fixed-free cantilever beam subjected to a distributed load r along the length of the beam.

The use of standard cells for design is highly encouraged to avoid mistakes. 9. Not only do you lose a bond pad for making a connection to your MEMS design, your neighbors on the multiproject wafer may gain a bond pad they did not necessarily desire! 26. This library includes shuttle plates, folded springs, rotary torsional springs, linear comb-drives and rotary comb-drives, rotary motors, and test circuits. Having these standard components available at the click of a mouse can significantly accelerate layout.

22 Color palette and layer setup. (Reprinted with permission from Dr. ) See color plate section. 23 Drawing toolbar. (Reprinted with permission from Dr. 23, can be used to select different shapes that will be drawn in the layout using the layer that has been selected from the color palette. Drawing objects include boxes, polygons, circles, pie wedges, toruses, ports, rulers, and instances. 24. The shapes include polygons (90 degrees, 45 degrees, all-angle), wires (90 degrees, 45 degrees, all-angle), standard curves (circles, tori, pie wedges), and special curves (splines, ellipses, spirals, sinusoids, hyperbolas, parabolas).

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